Title :
Large micromirror array designed and tested for multi-object spectroscopy
Author :
Canonica, Michael ; Zamkotsian, Frederic ; Lanzoni, Patrick ; Noell, Wilfried
Author_Institution :
Ecole Polytech. Fed. de Lausanne, Neuchatel, Switzerland
Abstract :
MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.
Keywords :
astronomical spectra; cryogenics; micromechanical devices; micromirrors; optical design techniques; optical testing; MEMS based programmable slit masks; cryogenic operation ability; micromirror array; multiobject spectroscopy; optical design; optical testing; surface flatness; Arrays; Cryogenics; Extraterrestrial measurements; Micromirrors; Silicon; Spectroscopy; MEMS; MOEMS; cryogenic application; large array; micromirror; multi-object spectroscopy; programmable slit mask;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318829
