Title :
The TeraMOS sensing pixel for monolithic passive uncooled THz imagers
Author :
Svetlitza, A. ; Brouk, I. ; Bar-Lev, S. ; Stolyarova, S. ; Nemirovsky, Y.
Author_Institution :
Dept. of Electr. Eng., Technion - Israel Inst. of Technol., Haifa, Israel
Abstract :
We report a novel THz sensor, based on several leading technologies: THz photonics, CMOS-SOI and NEMS. By integrating the TeraMOS sensor with “thermal antenna”, we expect to achieve a breakthrough in uncooled Terahertz passive imaging.
Keywords :
CMOS image sensors; antennas; focal planes; integrated optoelectronics; nanoelectromechanical devices; silicon-on-insulator; terahertz wave devices; terahertz wave imaging; CMOS-SOI; NEMS; TeraMOS sensing pixel; monolithic passive uncooled terahertz imagers; tereherts photonics; thermal antenna; uncooled terahertz passive imaging; Antenna measurements; Antennas; Arrays; Imaging; Temperature sensors; Transistors; CMOS-SOI-NEMS; FSS; Terahertz sensors; Thermal Antenna;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318833
