Title :
MEMS FTIR spectrometer and optical results
Author :
Ayerden, N. Pelin ; Stehle, Jean-Louis ; Holmstrom, Sven ; Urey, Hakan
Author_Institution :
Opt. Microsyst. Lab., Koc Univ., Istanbul, Turkey
Abstract :
MEMS LGI FTIR system is developed and optimized. Out-of-plane deflection >;500μm is obtained at 350Hz using piezoelectric and acoustic actuation. Optical system is optimized to obtain the best spectrum. 20μm SOI film thickness is measured.
Keywords :
infrared spectrometers; micro-optics; silicon-on-insulator; FTIR spectrometer; MEMS LGI FTIR system; SOI film thickness; acoustic actuation; frequency 350 Hz; optical results; optical system; out-of-plane deflection; piezoelectric actuation; size 20 mum; Detectors; Fourier transforms; Lenses; Micromechanical devices; Optical films; Thickness measurement; Fourier transform spectroscopy; MEMS; lamellar grating; thin film thickness;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318837
