Title :
MEMS micromirror based X-ray pulse modulators
Author :
Mukhopadhyay, Deepkishore ; Walko, Donald ; Jung, Il Woong ; Wang, Jin ; Shenoy, Gopal ; López, Daniel
Author_Institution :
Center for Nanoscale Mater., Argonne Nat. Lab., Argonne, IL, USA
Abstract :
We describe a MEMS micromirror for modulation of X-ray pulses needed for critical time-resolved process studies of cyclical and far-from-equilibrium phenomena. This MEMS micromirror leverages grazing-angle reflection of X-ray pulses to generate its temporal modulation response. The generated responses are 1.5μs wide for 8keV X-rays and have been successfully used to isolate single X-ray pulses separated 1.59μs from their suppressed neighboring pulses.
Keywords :
light reflection; micromechanical devices; micromirrors; optical modulation; MEMS micromirror; X-ray pulse modulators; electron volt energy 8 keV; far-from-equilibrium phenomena; grazing-angle reflection; temporal modulation; time 1.5 mus; time 1.59 mus; time-resolved process studies; Frequency modulation; Micromechanical devices; Micromirrors; Oscillators; Resonant frequency; Synchrotrons; MEMS; X-ray; micromirror; pulse modulator; torsional;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318841
