Title :
Fast optical phased array with ultra-lightweight high-contrast-grating mirrors
Author :
Yoo, Byung-Wook ; Chan, Trevor ; Megens, Mischa ; Sun, Tianbo ; Yang, Weijian ; Rao, Frank ; Chang-Hasnain, Connie ; Horsley, David A. ; Wu, Ming C.
Author_Institution :
Univ. of California, Berkeley, CA, USA
Abstract :
We report an optical phased array (OPA) using high-contrast-grating (HCG) as an electrostatically actuated mirror for the purpose of free space fast beamsteering. In this paper, several attractive properties of HCG mirror are introduced such as single material, high reflectance along a wide bandwidth and low-mass inertia and the fabrication result is shown. ±10° × 10° with 2° beam width is observed at 1550 nm wavelength using HCG optical phased array.
Keywords :
beam steering; diffraction gratings; electrostatic actuators; micromirrors; electrostatically actuated mirror; free space fast beamsteering; high reflectance; high-contrast-grating mirrors; low-mass inertia; optical phased array; single material; ultra-lightweight mirrors; wavelength 1550 nm; Arrays; Gratings; Laser beams; Mirrors; Optical beams; Optical imaging; Reflectivity;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318844
