Title :
Biaxial resonant 7mm-MEMS mirror for automotive LIDAR application
Author :
Hofmann, Ulrich ; Senger, Frank ; Soerensen, Frerk ; Stenchly, Vanessa ; Jensen, Bjoern ; Janes, Joachim
Author_Institution :
Fraunhofer Inst. for Silicon Technol. ISIT, Itzehoe, Germany
Abstract :
A resonant biaxial comb-actuated 7mm-MEMS scanning mirror with tripod-suspension is developed to provide omnidirectional scanning in an automotive time-of-flight LIDAR sensor application. Wafer level vacuum packaging technology is applied to enable circular scanning at 550Hz at large tilt angle.
Keywords :
electronics packaging; microfabrication; micromirrors; optical fabrication; optical radar; automotive LIDAR application; biaxial resonant MEMS scanning mirror; circular scanning; comb-actuated; frequency 550 Hz; large tilt angle; omnidirectional scanning; size 7 mm; tripod-suspension; wafer level vacuum packaging technology; Automotive engineering; Laser beams; Lenses; Measurement by laser beam; Micromechanical devices; Mirrors; Time measurement; LIDAR; MEMS mirror; comb drive; omnidirectional scanning; wafer level vacuum packaging;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318847
