Title :
Analysis of hard spring effect of tense poly-Si torsion bar of micromirror
Author :
Kundu, Subrata Kumar ; Ogawa, Shouhei ; Kumagai, Shinya ; Fujishima, Masayuki ; Hane, Kazuhiro ; Sasaki, Minoru
Author_Institution :
Dept. of Adv. Sci. & Technol., Toyota Technol. Inst., Naogya, Japan
Abstract :
The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.
Keywords :
elemental semiconductors; micro-optomechanical devices; micromirrors; semiconductor thin films; silicon; torsion; Si; hard spring effect; rotation angle; stabilized temperature characteristics; tense poly-Si torsion bar; tense polycrystalline torsion bar micromirror; Micromechanical devices; Micromirrors; Resonant frequency; Silicon; Springs; Temperature; Electrostatic Actuation; Hard Spring Effect; MEMS Devices; Micromirror; Poly-Si Torsion Bar;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318853
