Title :
Design and fabrication of a near-field scanning optical microscope probe by CMOS-MEMS
Author :
Liou, C.H. ; Chiu, Yun ; Shieh, H.P.D. ; Chiou, J.C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.
Keywords :
CMOS integrated circuits; micromechanical devices; near-field scanning optical microscopy; optical design techniques; optical fabrication; photodetectors; CMOS; MEMS; near-field scanning optical microscope probe; on-chip transimpedance amplifier; optical profile measurement; side pin-hole photodetector; Measurement by laser beam; Optical device fabrication; Optical fiber sensors; Optical fibers; Optical variables measurement; Photodetectors; CMOS-MEMS; near-field scanning optical microscope; photodetector; side photodetector; transimpedance amplifier;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318856
