Title :
Switching capacity of MEMS tilting micromirrors
Author_Institution :
Appl. Phys. Dept., Hebrew Univ. of Jerusalem, Jerusalem, Israel
Abstract :
The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.
Keywords :
beam steering; micromechanical devices; micromirrors; optical switches; MEMS tilting micromirrors; angular tilt range; mirror designs; switching capacity; Arrays; Micromechanical devices; Micromirrors; Optical beams; Optical fiber communication; Optical switches; MEMS; Optical switches; beam steering;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318864