Title :
An 8192-channel Grating Light Valve for Ultra-Violet Direct Write lithography
Author :
Payne, A. ; Myatt, G. ; Hunter, J. ; Yeung, M. ; Lu, J. ; Beach, G. ; Volchegursky, A. ; Eng, L.
Author_Institution :
Silicon Light Machines, Sunnyvale, CA, USA
Abstract :
Direct-write lithography holds the potential of revolutionizing micro-fabrication since it allows direct transmission of image data into the media, eliminating the time and cost of mask fabrication and maintenance. We have developed an 8192-channel direct-write spatial light modulator based on Grating Light Valve technology. This diffractive linear array operates at UV wavelengths from 350-450nm. It is a monolithically integrated device in which the GLV MEMS and CMOS drive circuitry are fabricated together on the same chip. The array operates with a refresh frequency of 250 kHz (4us), facilitating pixel transmission rates over 2 giga-pixels/s. Each channel driver supports 10-bit amplitude and 8-bit pulse edge timing control per column period. When combined with 355nm illumination and 10:1 reduction optics, 1.5um minimum features have been printed with a placement sub-grid resolution of 0.5um in both axes.
Keywords :
diffraction gratings; light valves; micro-optomechanical devices; microfabrication; optical arrays; optical fabrication; spatial light modulators; ultraviolet lithography; CMOS; GLV MEMS; diffractive linear array; edge timing control; frequency 250 kHz; grating light valve; mask fabrication; microfabrication; spatial light modulator; ultraviolet direct write lithography; wavelength 350 nm to 450 nm; Arrays; Delay; Gratings; Lighting; Micromechanical devices; Ultraviolet sources; Valves;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318866
