Title :
PZT micromirror with integrated piezoresistive position sensors
Author :
Bakke, Thor ; Johansen, Ib-Rune
Author_Institution :
Dept. of Microsyst. & Nanotechnol., SINTEF ICT, Oslo, Norway
Abstract :
PZT is an ideal material for high force micromechanical actuators. However, the inherent hysteresis prevents accurate positioning. By integrating piezoresistive sensors it has been shown that the actuation of a piston-type micromirror can be improved.
Keywords :
integrated optics; lead compounds; micro-optomechanical devices; microactuators; micromirrors; microsensors; optical sensors; piezoresistive devices; PZT; PZT micromirror; high force micromechanical actuators; inherent hysteresis; integrated piezoresistive position sensors; piston-type micromirror; positioning; Actuators; Hysteresis; Micromirrors; Piezoresistance; Resistors; Sensors; MEMS; PZT; micromirror; mirror; piezoelectric;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318868
