Title :
A slanted InP waveguide for fiber coupler using skewed dry etching process
Author :
Choi, S. ; Higo, A. ; Kikuta, K. ; Toshiyoshi, H. ; Nakano, Y.
Author_Institution :
Res. Center for Adv. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan
Abstract :
We propose a simple and efficient off-chip coupler for vertical coupling between optical fibers and InP-based slab waveguides. Etching angle of the waveguide edge is controlled by an etching jig made of SiO2-coated aluminum for ICP-RIE. Simulation shows that maximum 71% coupling efficiency would be obtained by matrix expansion methods.
Keywords :
III-V semiconductors; aluminium; indium compounds; optical fibre couplers; optical waveguides; silicon compounds; slabs; sputter etching; ICP-RIE; InP; InP-based slab waveguides; SiO2-Al; etching angle; etching jig; fiber coupler; matrix expansion; optical fibers; simple off-chip coupler; skewed dry etching process; slanted InP waveguide; vertical coupling; waveguide edge; Couplers; Couplings; Image edge detection; Indium phosphide; Optical fiber couplers;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318873
