Title :
Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning
Author :
Park, Hyeon-Cheol ; Lee, Jung-Hwan ; Park, Sang-Gil ; Jeong, Ki-Hun
Author_Institution :
Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
Abstract :
Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.
Keywords :
micromechanical devices; micromirrors; terahertz wave devices; low air damping; millimeter-scale scanning MEMS mirror; mirror scanning; sub-wavelength micro-hole arrays; sub-wavelength microhole arrays; terahertz wave scanning; Actuators; Damping; Micromechanical devices; Mirrors; Reflectivity; Silicon; Time domain analysis; MEMS scanning mirror; Terahertz; Terahertz time-domain spectroscopy. Sub-wavelength structure;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318889
