Title :
A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
Author :
Kah How Koh ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications.
Keywords :
CMOS integrated circuits; electromagnetic actuators; integrated optoelectronics; low-power electronics; micromechanical devices; micromirrors; CMOS compatible mirror; electromagnetic actuation; hybrid electrothermal actuation; low power 2D raster scanning MEMS mirror; low power hybrid MEMS mirror; Actuators; CMOS integrated circuits; Coils; Electromagnetics; Micromechanical devices; Micromirrors; Hybrid Actuation; Mirror; Optical Microelectromechanical Systems;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318890
