Title :
2-D MEMS scanner for handheld multispectral confocal microscopes
Author :
Il Woong Jung ; Rattanavarin, S. ; Sarapukdee, P. ; Mandella, M.J. ; Piyawattanametha, Wibool ; Lopez, D.
Author_Institution :
Center for Nanoscale Mater., Argonne Nat. Lab., Argonne, IL, USA
Abstract :
We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated from the reflectors to reduce light loss while maintaining chip size to 3.25 × 3.25 mm2. The devices are large-scale batch fabricated using a double layer SOI process. The scanner has electrostatic optical deflection angles of 3.25° for the inner axis at 75 V and ±1.6° for the outer axis at 60 V. The device has resonance frequencies of 2.84 kHz and 452 Hz for the inner and outer axis torsional modes respectively.
Keywords :
cancer; medical image processing; micromechanical devices; optical elements; optical scanners; silicon-on-insulator; 2D MEMS scanner; Si; cancer detection; cervical cancer; double layer SOI process; electrostatic optical deflection angles; frequency 2.84 kHz; frequency 453 Hz; handheld multispectral confocal microscopes; inner gimbal design; large-scale batch fabrication; reflectors; torsional modes; torsional springs; voltage 60 V; voltage 75 V; Electrostatic measurements; Frequency measurement; Measurement by laser beam; Micromechanical devices; Microscopy; Optical reflection; 2-D MEMS scanner; dual-axis confocal microscopy; microendoscope; micromirror; multi-spectral imaging;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
Print_ISBN :
978-1-4577-1511-2
DOI :
10.1109/OMEMS.2012.6318891
