DocumentCode :
3534960
Title :
An electrostatic in-plane rotational MEMS micro-scanner
Author :
Mu, Xiaojing ; Zhou, Guangya ; Du, Yu ; Kumar, A. Sentil ; Chau, Fook Siong ; Yu, Hongbin ; Tsai, Julius Ming-Lin
Author_Institution :
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear :
2012
fDate :
6-9 Aug. 2012
Firstpage :
240
Lastpage :
241
Abstract :
The paper presents an electrostatic in-plane rotational MEMS micro-scanner for circumferential scanned endoscopic optical coherence tomography probe. A diamond-turning-soft-lithography technology is introduced for six-slanted-facets pyramidal polygon micro-reflector fabrication.
Keywords :
electrostatic actuators; endoscopes; micro-optics; optical scanners; optical tomography; soft lithography; circumferential scanned endoscopic optical coherence tomography probe; diamond turning soft lithography technology; electrostatic in-plane rotational MEMS microscanner; six slanted facets pyramidal polygon microreflector fabrication; Electrostatics; Micromechanical devices; Optical device fabrication; Optical fibers; Optical reflection; Probes; MEMS; optical coherence tomography; pyramidal polygon reflector;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location :
Banff, AB
ISSN :
2160-5033
Print_ISBN :
978-1-4577-1511-2
Type :
conf
DOI :
10.1109/OMEMS.2012.6318892
Filename :
6318892
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3534960
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