RF integrated inductors with various slit patterns using CoFeBN soft magnetic film

Author

Yamaguchi, M. ; Kim, Jongryoul ; Kuribara, T. ; Fukushima, T. ; Inyoung Kim ; Jongryoul Kim

Author_Institution

Dept. of Electr. & Commun. Eng., Tohoku Univ., Japan

fYear

2005

fDate

4-8 April 2005

Firstpage

1089

Lastpage

1090

Abstract

Ferromagnetic RF integrated inductors has drawn attention of microwave engineers because of future possibility of further miniaturization and high-Q in monolithic microwave integrated circuit (MMIC). This paper attacks this complex problem by the combination of using CoFeBN high saturation moment thin film with fairly high FMR frequency and the artificial slit patterning to further increase of the FMR frequency and also to reduce the eddy currents. Both parallel slit pattern and orthogonal slit pattern are investigated.

Keywords

MMIC; cobalt alloys; eddy currents; ferromagnetic resonance; inductors; magnetic thin films; CoFeBN; MMIC; artificial slit patterning; eddy currents; ferromagnetic RF integrated inductors; ferromagnetic resonance; high saturation moment thin film; miniaturization; monolithic microwave integrated circuit; orthogonal slit pattern; resonance frequency; soft magnetic film; Eddy currents; MMICs; Magnetic films; Magnetic resonance; Microwave integrated circuits; Monolithic integrated circuits; Radio frequency; Radiofrequency integrated circuits; Thin film circuits; Thin film inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International

Print_ISBN

0-7803-9009-1

Type

conf

DOI

10.1109/INTMAG.2005.1463974

Filename

1463974