Title :
Free-standing Al/sub 0.30/Ga/sub 0.70/As thermopile infrared sensor
Author :
Dehe, A. ; Hartnagel, H.L.
Author_Institution :
Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany
Abstract :
Bolometric infrared sensors using integrated thermoelements for temperature detection and membrane structures for thermal isolation of the absorber are passive devices for highly sensitive remote temperature measurements. With the typical broad banded response to infrared radiation this device has a wide area of applications. We used the GaAs/AlGaAs material system for this purpose as its material parameters show advantages in terms of sensor performance and technology.
Keywords :
III-V semiconductors; aluminium compounds; bolometers; gallium arsenide; infrared detectors; temperature measurement; temperature sensors; thermoelectric devices; thermopiles; GaAs-Al/sub 0.30/Ga/sub 0.70/As; bolometric sensor; free-standing thermopile infrared sensor; integrated thermoelements; membrane structures; passive device; remote measurements; temperature detection; thermal isolation; Bridges; Conducting materials; Design optimization; Electromagnetic wave absorption; Etching; Geometry; Gold; Infrared sensors; Photonic band gap; Thermal resistance;
Conference_Titel :
Device Research Conference, 1995. Digest. 1995 53rd Annual
Conference_Location :
Charlottesville, VA, USA
Print_ISBN :
0-7803-2788-8
DOI :
10.1109/DRC.1995.496295
