Free-standing Al/sub 0.30/Ga/sub 0.70/As thermopile infrared sensor

Author

Dehe, A. ; Hartnagel, H.L.

Author_Institution

Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany

fYear

1995

fDate

19-21 June 1995

Firstpage

120

Lastpage

121

Abstract

Bolometric infrared sensors using integrated thermoelements for temperature detection and membrane structures for thermal isolation of the absorber are passive devices for highly sensitive remote temperature measurements. With the typical broad banded response to infrared radiation this device has a wide area of applications. We used the GaAs/AlGaAs material system for this purpose as its material parameters show advantages in terms of sensor performance and technology.

Keywords

III-V semiconductors; aluminium compounds; bolometers; gallium arsenide; infrared detectors; temperature measurement; temperature sensors; thermoelectric devices; thermopiles; GaAs-Al/sub 0.30/Ga/sub 0.70/As; bolometric sensor; free-standing thermopile infrared sensor; integrated thermoelements; membrane structures; passive device; remote measurements; temperature detection; thermal isolation; Bridges; Conducting materials; Design optimization; Electromagnetic wave absorption; Etching; Geometry; Gold; Infrared sensors; Photonic band gap; Thermal resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 1995. Digest. 1995 53rd Annual

Conference_Location

Charlottesville, VA, USA

Print_ISBN

0-7803-2788-8

Type

conf

DOI

10.1109/DRC.1995.496295

Filename

496295