Title :
Multi-terminal pulsed force & sense ESD verification of I/O libraries and ESD simulations
Author :
Druen, Stephan ; Streibl, Martin ; Esmark, Kai ; Domanski, Krzysztof ; Niemesheim, Josef ; Gossner, Harald ; Schmitt-Landsiedel, Doris
Author_Institution :
Inst. of Tech. Electron., Tech. Univ. of Munich, Munich, Germany
Abstract :
A multi-terminal TLP measurement technique is used for accessing current and voltage distributions during ESD in typical I/O cell frames in a 0.13 um CMOS technology. The procedure extends traditional I/O library testchip based ESD verification and qualification tests, allows to calibrate ESD chip-level simulation tools and to derive precise I/O library application rules.
Keywords :
CMOS integrated circuits; circuit simulation; electric current measurement; electrostatic discharge; voltage measurement; CMOS technology; ESD chip-level simulation tool; I-O library; current distribution; multiterminal pulsed force; sense ESD verification; voltage distribution; CMOS technology; Electrical resistance measurement; Electrostatic discharge; Libraries; Measurement techniques; Protection; Pulse measurements; Rails; Testing; Voltage;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2004. EOS/ESD '04.
Conference_Location :
Grapevine, TX
Print_ISBN :
978-1-5853-7063-4
Electronic_ISBN :
978-1-5853-7063-4
DOI :
10.1109/EOSESD.2004.5272589
