DocumentCode
3535730
Title
ESD protection solutions for high voltage technologies
Author
Keppens, Bart ; Mergens, Markus P J ; Trinh, Cong Son ; Russ, Christian C. ; Van Camp, B. ; Verhaege, Koen G.
Author_Institution
Sarnoff Eur., Gistel, Belgium
fYear
2004
fDate
19-23 Sept. 2004
Firstpage
1
Lastpage
10
Abstract
There is a trend to revive mature technologies while including high voltage options. ESD protection in those technologies is challenging due to narrow ESD design windows, NMOS degradation issues and the creation of unexpectedly weak parasitic devices. Different case studies are presented for ESD protection based on latch-up immune SCR devices.
Keywords
CMOS integrated circuits; MOSFET; electrostatic discharge; elemental semiconductors; integrated circuit reliability; power integrated circuits; power transistors; silicon; thyristors; CMOS technology; ESD protection solutions; NMOS degradation; Si; ggNMOS transistors; high voltage technology; latch-up immune SCR devices; silicon controlled rectifiers; weak parasitic devices; CMOS technology; Electrostatic discharge; Implants; MOS devices; MOSFETs; Neodymium; Neural networks; Protection; Thyristors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium, 2004. EOS/ESD '04.
Conference_Location
Grapevine, TX
Print_ISBN
978-1-5853-7063-4
Electronic_ISBN
978-1-5853-7063-4
Type
conf
DOI
10.1109/EOSESD.2004.5272593
Filename
5272593
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