Author_Institution :
Caltech Micromachining Group, California Inst. of Technol., Pasadena, CA, USA
Abstract :
The general development of electrostatic and magnetostatic micromotors is discussed. Electrostatic micromotors already have many useful applications and will continue to flourish. On the other hand, magnetostatic micromotors are emerging as fabrication technologies are developing. The advantages of larger forces and longer working distances are especially promising
Keywords :
electrostatic devices; magnetostatics; micromotors; electrostatic micromotors; fabrication technologies; magnetostatic micromotors; micromotor forces; working distances; Displays; Electrodes; Electrostatic actuators; FETs; Magnetostatics; Microactuators; Micromechanical devices; Micromotors; Microstructure; Mirrors;
Conference_Titel :
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN :
0-7803-2624-5
DOI :
10.1109/TENCON.1995.496322
