Title :
A micro silicon hot-wire anemometer
Author :
Mischler, Martin ; Tseng, Fan-Gang ; Ulmanella, Umberto ; Ho, Chih-Ming ; Jiang, Fukang ; Tai, Yu-Chong
Author_Institution :
Dept. of Mech. Aerosp. & Nucl. Eng., California Univ., Los Angeles, CA, USA
Abstract :
A new micromachined hot-wire anemometer has been developed. Extensive tests of the anemometer´s dependence on ambient temperature, over-heat ratio, and sensor length have been finalized. Due to its extremely small size, micromachined hot-wire has better sensitivity, temporal and spatial resolutions than the conventional hot-wire. Because of the large bandwidth (MHz), velocity fluctuations at high Reynolds number flow can be measured
Keywords :
anemometers; elemental semiconductors; flow measurement; microsensors; sensitivity; silicon; Reynolds number flow; Si; ambient temperature; bandwidth; micromachined hot-wire anemometer; over-heat ratio; sensitivity; sensor length; spatial resolution; temporal resolution; velocity fluctuations; Fluctuations; Fluid flow measurement; Interference; Probes; Silicon; Space technology; Spatial resolution; Temperature sensors; Velocity measurement; Wire;
Conference_Titel :
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN :
0-7803-2624-5
DOI :
10.1109/TENCON.1995.496325
