Title :
Notes on maintaining sub-1V balance of an ionizer
Author_Institution :
Credence Technol. Inc., Soquel, CA, USA
Abstract :
This paper discusses steps necessary to undertake and technical details on setting up and maintaining sub-1V balance in the ionizeed environment. Specifics of closed-loop control are discussed. Results of tests under various conditions are presented.
Keywords :
closed loop systems; electrostatic devices; electrostatic discharge; ionisation; closed-loop control; ionized environment; ionizer; sub-1V balance; Circuits; Displays; Humidity; Instruments; Intelligent sensors; Ionization; Magnetic heads; Monitoring; Production facilities; Testing;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2004. EOS/ESD '04.
Conference_Location :
Grapevine, TX
Print_ISBN :
978-1-5853-7063-4
Electronic_ISBN :
978-1-5853-7063-4
DOI :
10.1109/EOSESD.2004.5272608
