Title :
Formation and suppression of a newly discovered secondary EOS event in HBM test systems
Author :
Meuse, Tom ; Ting, Larry ; Schichl, Joe ; Barrett, Robert ; Bennett, David ; Cline, Roger ; Duvvury, Charvaka ; Hopkins, Michael ; Kunz, Hans ; Leiserson, John ; Steinhoff, Robert
Author_Institution :
Thermo Electron Corp., Lowell, MA, USA
Abstract :
A previously undetected trailing pulse from HBM testers was found to create unexpected gate oxide failures on new technologies. This secondary pulse, which is EOS in nature, is caused by the discharge relay and the parasitics of the charge circuit. This paper investigates this critical phenomenon and establishes the tester improvements to safely suppress the trailing pulse effects.
Keywords :
electrostatic discharge; HBM test systems; formation; gate oxide failures; secondary EOS event; suppression; trailing pulse effects; Biological system modeling; Circuit testing; Degradation; Earth Observing System; Pulse circuits; Relays; Semiconductor device testing; Stress; System testing; Voltage;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2004. EOS/ESD '04.
Conference_Location :
Grapevine, TX
Print_ISBN :
978-1-5853-7063-4
Electronic_ISBN :
978-1-5853-7063-4
DOI :
10.1109/EOSESD.2004.5272618
