Development of a novel micro FIA-ISFET integrated sensor

Author

Mengnian, Niu ; Ding Xinfang ; Xiang, Tao ; Wei, Lin

Author_Institution

Inst. of Metall., Acad. Sinica, Shanghai, China

fYear

1995

fDate

6-10 Nov 1995

Firstpage

183

Lastpage

186

Abstract

Based on the principle of flow injection analysis (FIA), this paper reports a novel micro FIA-ISFET integrated sensor. Four pairs of long-arm pH-ISFET/REFET units and symmetric Ti/Au film pseudo-reference electrodes are integrated on the chip, so that an integrated configuration of transducer and micro flow-through cell is achieved. The chip size of the sensor is 6*8mm². Initial experimental results indicate that the liquid can be measured driven by peristaltic pump flows with great fluency and that the amount of test sample needed in dynamic measurement is greatly reduced. The integrated sensor has quick response and its reliability and stability are considerably improved

Keywords

MOS integrated circuits; chemical sensors; ion sensitive field effect transistors; micromachining; microsensors; pH measurement; NMOS IC technology; Ti-Au; chip size; dynamic measurement; flow injection analysis; liquid measurement; long-arm pH-ISFET/REFET units; micro FIA-ISFET integrated sensor; micro flow-through cell; peristaltic pump flows; quick response; reliability; stability; symmetric Ti/Au film pseudo-reference electrodes; Biomedical electrodes; Biomedical measurements; Circuit stability; Fabrication; Fluid flow measurement; Gold; Integrated circuit measurements; Semiconductor device measurement; Sensor arrays; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Print_ISBN

0-7803-2624-5

Type

conf

DOI

10.1109/TENCON.1995.496368

Filename

496368