DocumentCode
3536314
Title
Optimized CMOS infrared detector microsystems
Author
Schneeberger, N. ; Déteindre, S. ; Paul, O. ; Baltes, H.
Author_Institution
Lab. of Phys. Electron., Eidgenossische Tech. Hochschule, Zurich, Switzerland
fYear
1995
fDate
6-10 Nov 1995
Firstpage
198
Lastpage
201
Abstract
We fabricated and characterized four different CMOS thermoelectric infrared radiation sensor microsystems. The performance of these systems was modelled with the finite element simulation package SOLIDIS, based on measured materials properties. The agreement with experiment was better than 7.5%. Based on this validation we optimized the design parameters of such microsystems
Keywords
CMOS integrated circuits; circuit optimisation; finite element analysis; infrared detectors; integrated circuit modelling; micromachining; microsensors; thermoelectric devices; CMOS thermoelectric infrared radiation sensor microsystems; SOLIDIS; design parameter optimization; double poly double metal CMOS process; finite element simulation package; micromachined thermoelectric sensor; performance modelling; Finite element methods; Infrared detectors; Infrared sensors; Material properties; Packaging; Semiconductor device modeling; Sensor phenomena and characterization; Solid modeling; Thermal sensors; Thermoelectricity;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN
0-7803-2624-5
Type
conf
DOI
10.1109/TENCON.1995.496372
Filename
496372
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