DocumentCode
3536621
Title
Two-stage fast focus method for mask registration
Author
He, M.G. ; Harvey, L.
Author_Institution
Dept. of Electr. Eng., R. Melbourne Inst. of Technol., Vic., Australia
fYear
1995
fDate
6-10 Nov 1995
Firstpage
295
Lastpage
298
Abstract
For mask registration, we require matching between masks to be fast and reliable. By using coarse/fine search, the process can be speeded up but reach a point where the search speed is maximised while the process is still reliable. A two-stage probability based fast focus search strategy is proposed for mask matching in binary or grey scale images to further increase the search step while maintaining reliability of the process
Keywords
image matching; masks; search problems; binary images; coarse/fine search; fast focus search; grey scale images; mask matching; mask registration; reliability; two-stage probability; Focusing; Helium; Maintenance; Pixel; Probability; Search methods; Turning;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on
Print_ISBN
0-7803-2624-5
Type
conf
DOI
10.1109/TENCON.1995.496398
Filename
496398
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