Title :
High-accuracy dimension measurements of complex optical parts using femtosecond optical pulses
Author :
Minoshima, K. ; Matsumoto, H.
Keywords :
Chemical lasers; Laser ablation; Laser beams; Nonlinear optics; Optical filters; Optical interferometry; Optical pulses; Pulse measurements; Pulsed laser deposition; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
DOI :
10.1109/CLEOPR.1995.527287