DocumentCode
3536944
Title
Reduction of particles in a-Si films deposited by laser ablation
Author
Uchida, Hironaga ; Tsujihara, K. ; Ishihara, Sayaka ; Nakamura, N. ; Hasegawa, Hiroshi ; Hanabusa, M.
fYear
1995
fDate
10-14 July 1995
Firstpage
296
Keywords
Ceramics; Chemical lasers; Laser ablation; Optical device fabrication; Optical films; Optical materials; Organic materials; Polymer films; Pulsed laser deposition; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-2400-5
Type
conf
DOI
10.1109/CLEOPR.1995.527288
Filename
527288
Link To Document