DocumentCode :
3536944
Title :
Reduction of particles in a-Si films deposited by laser ablation
Author :
Uchida, Hironaga ; Tsujihara, K. ; Ishihara, Sayaka ; Nakamura, N. ; Hasegawa, Hiroshi ; Hanabusa, M.
fYear :
1995
fDate :
10-14 July 1995
Firstpage :
296
Keywords :
Ceramics; Chemical lasers; Laser ablation; Optical device fabrication; Optical films; Optical materials; Organic materials; Polymer films; Pulsed laser deposition; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-2400-5
Type :
conf
DOI :
10.1109/CLEOPR.1995.527288
Filename :
527288
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3536944
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