• DocumentCode
    3537199
  • Title

    Automated setup for investigation of the semiconductor structures electrophysical properties

  • Author

    Neveshkin, A.A. ; Slapovskaya, Y.P. ; Gribenko, A.F. ; Chepurnov, M.A.

  • Author_Institution
    Saratov State Tech. Univ., Saratov, Russia
  • fYear
    2012
  • fDate
    19-20 Sept. 2012
  • Firstpage
    367
  • Lastpage
    370
  • Abstract
    An automated setup for investigation of the semiconductor structures electrophysical properties is described. The design, the scheme of connection with a computer, and software of the setup are described. The test measurements were done and results are presented.
  • Keywords
    automatic test equipment; materials testing; semiconductor materials; automated setup; computer setup; connection design; connection scheme; electrophysical properties; semiconductor structures; software setup; test measurements;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
  • Conference_Location
    Saratov
  • Print_ISBN
    978-1-4673-2096-2
  • Type

    conf

  • DOI
    10.1109/APEDE.2012.6478083
  • Filename
    6478083
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3537199