Title :
Automated setup for investigation of the semiconductor structures electrophysical properties
Author :
Neveshkin, A.A. ; Slapovskaya, Y.P. ; Gribenko, A.F. ; Chepurnov, M.A.
Author_Institution :
Saratov State Tech. Univ., Saratov, Russia
Abstract :
An automated setup for investigation of the semiconductor structures electrophysical properties is described. The design, the scheme of connection with a computer, and software of the setup are described. The test measurements were done and results are presented.
Keywords :
automatic test equipment; materials testing; semiconductor materials; automated setup; computer setup; connection design; connection scheme; electrophysical properties; semiconductor structures; software setup; test measurements;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4673-2096-2
DOI :
10.1109/APEDE.2012.6478083
