Title :
Nickel nanoparticles influence on the electrical properties of porous silicon obtained by the no-current electroless etching
Author :
Bilenko, D.I. ; Galushka, V.V. ; Mysenko, I.B. ; Terin, D.V.
Author_Institution :
Saratov State Univ., Saratov, Russia
Abstract :
Nickel nanoparticles influence on the electrical properties of porous silicon obtained by the no-current electroless etching are investigated.
Keywords :
electrical conductivity; elemental semiconductors; etching; nanoparticles; nickel; porous semiconductors; silicon; Si:Ni; electrical properties; nickel nanoparticles; no-current electroless etching; porous silicon; Nickel;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4673-2096-2
DOI :
10.1109/APEDE.2012.6478097
