Title :
Laser Ablated Silicon Gratings for Temperature Measurements
Author :
Chung-Yen Chao ; Cheng-Yen Chen ; Chee-Wee Liu ; Yih Chang ; Yang, C.C.
Author_Institution :
National Taiwan University
Keywords :
Gratings; Silicon; Temperature measurement;
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
DOI :
10.1109/CLEOE.1998.719255