DocumentCode :
3538429
Title :
Effect of ambient gas on self-healing breakdown of polyimide thin films
Author :
Muramoto, Y. ; Fujino, K. ; Nagao, M. ; Kosaki, M.
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
fYear :
1995
fDate :
17-20 Sep 1995
Firstpage :
347
Lastpage :
350
Abstract :
The purpose of this study is to clarify the effect of ambient gas (in dry air and SF6) on self-healing breakdown characteristics of polyimide thin films. The effect of polarity reversal after breakdown was also studied and the breakdown mechanism at the polarity reversal was discussed
Keywords :
electric breakdown; polymer films; SF6; ambient gas; dry air; polarity reversal; polyimide thin films; self-healing breakdown; Breakdown voltage; Electric breakdown; Electrodes; Insulation; Polyimides; Polymer films; Semiconductor thin films; Temperature dependence; Transistors; Vacuum breakdown;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Insulating Materials, 1995. International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
4-88686-047-8
Type :
conf
DOI :
10.1109/ISEIM.1995.496580
Filename :
496580
Link To Document :
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