Title :
DIrect observation of a current-confined-path nano-oxide layer structure by three-dimensional atom probe
Author :
Fukuzawa, H. ; Iwasaki, Hisao ; Tanaka, Y. ; Ulfig, R.M. ; Larson, D.J.
Author_Institution :
Corp. R & D Center, Toshiba Corp., Kawasaki, Japan
Abstract :
Successful observation of current-confined-path (CCP) structures in the current-perpendicular-to-plane (CPP) film by the local electrode atom probe (LEAP) is reported. The CCP-CPP spin-valve film is composed of substrate/Ta/Ru/PtMn/CoFe/Ru/CoFe/CCP-nanooxide layer(NOL) spacer/CoFe/NiFe, where CCP-NOL spacer layer of AlCu-NOL is formed by ion-assisted oxidation. LEAP images show that field evaporation successfully progressed from the top protective cap to the bottom underlayer. In addition, the LEAP data clearly detects the CCP structure made by Cu in the Al2O3 matrix. The direct three-dimensional observation of the Cu-alumina CCP nano-structure by LEAP enables the derivation of the density of the metallic channels and the composition profile of the specific elements inside these metallic channels.
Keywords :
aluminium compounds; cobalt alloys; copper; ferromagnetic materials; field evaporation; iron alloys; magnetic multilayers; manganese alloys; nanostructured materials; nickel alloys; oxidation; platinum alloys; ruthenium; spin valves; tantalum; Ta-Ru-PtMn-CoFe-Cu-Al2O3-NiFe; composition profile; current-confined-path nanooxide layer structure; current-perpendicular-to-plane film; field evaporation; ion-assisted oxidation; local electrode atom probe; metallic channel density; protective cap; spin-valve film; three-dimensional atom probe; underlayer; Data visualization; Giant magnetoresistance; Instruments; Magnetic recording; Magnetic tunneling; Nanostructures; Oxidation; Probes; Protection; Scattering;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1464283
