Title :
Low actuation voltage RF MEMS switch for WiMAX applications
Author :
Darani, Babak Yousefi ; Sani, Ebrahim Abbaspour ; Shayanfar, Reza ; Shams, Adel ; Mirmozafari, Mir Hamed
Author_Institution :
Dept. of Electr. Eng., Urmia Univ., Urmia, Iran
Abstract :
This paper presents design, analysis, proposed fabrication process and simulation of a novel direct-contact (dc) RF-MEMS switch specified for WiMAX applications. The proposed MEMS switch will be used to switch the RF signal in the frequency range between 2GHz and 6GHz across a CPW transmission line. The switch has two large electrode plates to achieve low actuation voltage. The actuation voltage of the switch is 1.3V that make it compatible with CMOS circuits. The proposed structure provides excellent RF characteristics (Isolation -35dB at 10GHz and Insertion Loss -0.16dB at 10GHz). Considering the limitations of Urmia Micromachine Research Center, a verified fabrication process has been proposed.
Keywords :
CMOS integrated circuits; WiMax; coplanar transmission lines; coplanar waveguides; microswitches; CMOS circuits; CPW transmission line; RF signal; Urmia Micromachine Research Center; WiMAX applications; fabrication process; frequency 2 GHz to 6 GHz; low actuation voltage RF MEMS switch; microelectro-mechanical systems; Contacts; Microswitches; Radio frequency; Springs; Stress; Switching circuits; MEMS; RF-MEMS switch; WiMAX; low actuation voltage; ohmic contact MEMS switch;
Conference_Titel :
RF and Microwave Conference (RFM), 2011 IEEE International
Conference_Location :
Seremban, Negeri Sembilan
Print_ISBN :
978-1-4577-1628-7
DOI :
10.1109/RFM.2011.6168765
