Micro-machined magnetostatic wave coupled resonators

This work presents the design, technology and experiment on a frequency tunable narrow-band filter based on coupled straight edge resonators (SERs). A number of series configurations of cascaded resonators have been obtained by properly masking a yttrium iron garnet (YIG) magnetic film, and by using a wet chemical etching technique in hot phosphoric acid to get the coupled SERs directly onto the gadolinium gallium garnet (GGG) substrate used for the epitaxial growth. Ferromagnetic resonance (FMR) measurements of the coupled SERs are done. Theoretical design and circuit simulation are also presented.