Micro-machined magnetostatic wave coupled resonators

Author

Marcelli, R. ; Koike, T.

Author_Institution

CNR, Rome, Italy

fYear

2005

fDate

4-8 April 2005

Firstpage

1933

Lastpage

1934

Abstract

This work presents the design, technology and experiment on a frequency tunable narrow-band filter based on coupled straight edge resonators (SERs). A number of series configurations of cascaded resonators have been obtained by properly masking a yttrium iron garnet (YIG) magnetic film, and by using a wet chemical etching technique in hot phosphoric acid to get the coupled SERs directly onto the gadolinium gallium garnet (GGG) substrate used for the epitaxial growth. Ferromagnetic resonance (FMR) measurements of the coupled SERs are done. Theoretical design and circuit simulation are also presented.

Keywords

band-pass filters; circuit simulation; coupled circuits; etching; ferromagnetic resonance; gadolinium compounds; garnets; magnetic epitaxial layers; magnetostatic wave devices; micromachining; micromechanical resonators; resonator filters; yttrium compounds; GdGG; GdGa5O12; YFe5O12; YIG; cascaded resonators; circuit simulation; epitaxial growth; ferromagnetic resonance; frequency tunable narrow-band filter; magnetic film; micromachined magnetostatic wave coupled resonators; phosphoric acid; wet chemical etching; Chemical technology; Coupling circuits; Frequency; Garnets; Magnetic resonance; Magnetic separation; Magnetostatic waves; Narrowband; Resonator filters; Tunable circuits and devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International

Print_ISBN

0-7803-9009-1

Type

conf

DOI

10.1109/INTMAG.2005.1464401

Filename

1464401