A novel monolithically fabricated Lorentz force actuator using polymer magnets

We present a novel monolithically fabricated electromagnetic actuator/generator based on the Lorentz force principle. The basic build-up consists of electroplated wires held by springs above a structured polymer magnet. This laterally driven electromagnetic micro actuator provides parallel actuation to the substrate surface (in-plane motion). Contrary to systems with a hybrid build-up the presented fabrication process allows a highly flexible definition of magnetic areas and their shapes. This device was simulated, fabricated and successfully tested. Applications are e.g. micro motors, switches, active valves and pumps.