Title :
Frequency-independent equivalent circuit model for ferromagnetic RF integrated inductors
Author :
Sugahara, K. ; Tanabe, S. ; Yamaguchi, M.
Author_Institution :
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Amagasaki, Japan
Abstract :
This paper presents a physically meaningful equivalent circuit of the ferromagnetic RF integrated inductor, valid over a wide frequency range: DC to 20 GHz. CoNBZr ferromagnetic film was micro-patterned on top of the inductors to enhance inductance and quality factor. Multi-objective Nelder-Mead simplex method was used to optimize the complex equivalent circuit parameters. The frequency profile of the ferromagnetic RF integrated inductor is presented.
Keywords :
Q-factor; cobalt alloys; equivalent circuits; ferromagnetic materials; inductance; inductors; integrated circuit modelling; magnetic thin films; niobium alloys; radiofrequency integrated circuits; zirconium alloys; 0 to 20 GHz; CoNbZr; ferromagnetic RF integrated inductors; ferromagnetic film; frequency profile; frequency-independent equivalent circuit model; inductance; micropatterning; multiobjective Nelder-Mead simplex method; quality factor; Conductivity; Cost function; Equivalent circuits; Integrated circuit measurements; Optimization methods; Radio frequency; Scattering parameters; Semiconductor device modeling; Spirals; Thin film inductors;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1464475
