Title :
Fabrication of voltage-driven magneto-optical spatial light modulator
Author :
Takagi, H. ; Park, I.H. ; Mizoguchi, M. ; Nishimura, K. ; Uchida, H. ; Inoue, M.
Author_Institution :
Toyota Nat. Coll. of Technol., Japan
Abstract :
Aerosol deposition method (ADM) was adopted to fabricate the piezoelectric PZT film without the high temperature annealing process to reduce the damage of the Bi:YlG layer. The voltage-driven magneto-optic spatial light modulator (MOSLM) was fabricated on flat-surface Bi:YIG film including pixel structure by site-selected epitaxial method. Finite element method was used to investigated efficiency of the structure. PZT film was used to stress the magneto-optical Bi:YIG film to switch the magnetization direction of the film.
Keywords :
aerosols; annealing; bismuth; epitaxial growth; finite element analysis; magnetic switching; magnetisation; magneto-optical modulation; optical fabrication; piezoelectric thin films; spatial light modulators; yttrium compounds; PZT; PbZrO3TiO3; YFe5O12:Bi; YIG:Bi; aerosol deposition method; annealing; finite element method; magnetization direction switching; magneto-optical film; piezoelectric PZT film; pixel structure; site-selected epitaxial method; voltage-driven magneto-optical spatial light modulator; Aerosols; Annealing; Fabrication; Finite element methods; Magnetic modulators; Optical modulation; Piezoelectric films; Switches; Temperature; Voltage;
Conference_Titel :
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
Print_ISBN :
0-7803-9009-1
DOI :
10.1109/INTMAG.2005.1464481
