• DocumentCode
    3540437
  • Title

    Fabrication of two dimensional magnetophotonic crystal by selective-area sputter epitaxy

  • Author

    Park, J.H. ; Fujikawa, R. ; Kazuhiro, N. ; Uchida, H. ; Inoue, M.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
  • fYear
    2005
  • fDate
    4-8 April 2005
  • Firstpage
    2089
  • Lastpage
    2090
  • Abstract
    This study demonstrates the fabrication of 2D magnetophotonic crystal (MPC) by selective-area sputter epitaxy (SASE) of iron-garnet film, (BiYDy)3(FeAl)5O12 for the first time. This fabrication method overcomes the disadvantages associated with groove etching due to underetching and nonplanar surface topology.
  • Keywords
    bismuth compounds; dysprosium compounds; magneto-optical effects; optical fabrication; optical films; photonic crystals; sputter deposition; yttrium compounds; (BiYDy)3(FeAl)5O12; groove etching; iron-garnet film; nonplanar surface topology; selective-area sputter epitaxy; two dimensional magnetophotonic crystal; Amorphous magnetic materials; Artificial intelligence; Epitaxial growth; Magnetic domains; Magnetic films; Optical device fabrication; Optical films; Optical waveguides; Photonic crystals; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
  • Print_ISBN
    0-7803-9009-1
  • Type

    conf

  • DOI
    10.1109/INTMAG.2005.1464483
  • Filename
    1464483
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3540437