Title : 
Fabrication of two dimensional magnetophotonic crystal by selective-area sputter epitaxy
         
        
            Author : 
Park, J.H. ; Fujikawa, R. ; Kazuhiro, N. ; Uchida, H. ; Inoue, M.
         
        
            Author_Institution : 
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
         
        
        
        
        
        
            Abstract : 
This study demonstrates the fabrication of 2D magnetophotonic crystal (MPC) by selective-area sputter epitaxy (SASE) of iron-garnet film, (BiYDy)3(FeAl)5O12 for the first time. This fabrication method overcomes the disadvantages associated with groove etching due to underetching and nonplanar surface topology.
         
        
            Keywords : 
bismuth compounds; dysprosium compounds; magneto-optical effects; optical fabrication; optical films; photonic crystals; sputter deposition; yttrium compounds; (BiYDy)3(FeAl)5O12; groove etching; iron-garnet film; nonplanar surface topology; selective-area sputter epitaxy; two dimensional magnetophotonic crystal; Amorphous magnetic materials; Artificial intelligence; Epitaxial growth; Magnetic domains; Magnetic films; Optical device fabrication; Optical films; Optical waveguides; Photonic crystals; Substrates;
         
        
        
        
            Conference_Titel : 
Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International
         
        
            Print_ISBN : 
0-7803-9009-1
         
        
        
            DOI : 
10.1109/INTMAG.2005.1464483