Title :
In situ ellipsometric monitoring of growth of zinc oxide thin films with applications to high-frequency fiber acousto-optic components
Author :
Zayer, N.K. ; Grellier, A.J.C. ; Pannell, C.N. ; Greef ; Rogers, Keith ; Zervas, Michalis N.
Author_Institution :
Sch. of Phys. Sci., Kent Univ., Canterbury, UK
Abstract :
Summary form only given. Thin-film acoustic transducers of zinc oxide (ZnO) are currently being investigated by several research groups for application to in fiber or at least fiber-compatible acoustooptic devices operating in the GHz frequency range. RF or DC sputtering is the method of choice for growing these films, although other methods such as pulsed laser deposition (PLD) have also been used.
Keywords :
acousto-optical devices; ellipsometry; monitoring; optical communication equipment; optical films; pulsed laser deposition; sputter deposition; zinc compounds; DC sputtering; GHz frequency range; RF sputtering; ZnO; fiber-compatible acoustooptic devices; high-frequency fiber acousto-optic components; in situ ellipsometric monitoring; pulsed laser deposition; thin-film acoustic transducers; zinc oxide thin film growth; Acoustic transducers; Acoustooptic devices; Frequency; Monitoring; Optical fiber devices; Pulsed laser deposition; Sputtering; Thin film devices; Transistors; Zinc oxide;
Conference_Titel :
Lasers and Electro-Optics, 1998. CLEO 98. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
1-55752-339-0
DOI :
10.1109/CLEO.1998.676127
