Title :
Modeling and simulation for a μ-structure silicon pressure sensor
Author :
Aldarouich, Ahmad ; Yuan, Haiwen ; Ali, Mohamed ; Huang, Jiaoying
Author_Institution :
Sch. of Autom. Sci. & Electr. Eng., Beihang Univ., Beijing, China
Abstract :
Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring pressure is established. The relationship between the basic natural frequency of the beam resonator and the pressure is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a set of optimum parameters of the proposed sensing unit is determined.
Keywords :
beams (structures); diaphragms; finite element analysis; micromechanical resonators; microsensors; pressure measurement; pressure sensors; silicon; vibrations; E-type round diaphragm; FEM; Si; beam resonator vibration; differential output signals; microsensor sensing mechanism; mu-structure silicon pressure sensor; natural frequency; pressure measurement; sensing unit optimum parameters; silicon beam resonator; Frequency; Instruments; Intelligent sensors; Mechanical sensors; Pressure measurement; Resonance; Sensor phenomena and characterization; Silicon; Stress; Temperature sensors; E-type round diaphragm; beam; finite-element method; microsensor; pressure;
Conference_Titel :
Electronic Measurement & Instruments, 2009. ICEMI '09. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-3863-1
Electronic_ISBN :
978-1-4244-3864-8
DOI :
10.1109/ICEMI.2009.5274091
