Modeling and simulation for a μ-structure silicon pressure sensor

Author

Aldarouich, Ahmad ; Yuan, Haiwen ; Ali, Mohamed ; Huang, Jiaoying

Author_Institution

Sch. of Autom. Sci. & Electr. Eng., Beihang Univ., Beijing, China

fYear

2009

fDate

16-19 Aug. 2009

Abstract

Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring pressure is established. The relationship between the basic natural frequency of the beam resonator and the pressure is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a set of optimum parameters of the proposed sensing unit is determined.

Keywords

beams (structures); diaphragms; finite element analysis; micromechanical resonators; microsensors; pressure measurement; pressure sensors; silicon; vibrations; E-type round diaphragm; FEM; Si; beam resonator vibration; differential output signals; microsensor sensing mechanism; mu-structure silicon pressure sensor; natural frequency; pressure measurement; sensing unit optimum parameters; silicon beam resonator; Frequency; Instruments; Intelligent sensors; Mechanical sensors; Pressure measurement; Resonance; Sensor phenomena and characterization; Silicon; Stress; Temperature sensors; E-type round diaphragm; beam; finite-element method; microsensor; pressure;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Measurement & Instruments, 2009. ICEMI '09. 9th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-3863-1

Electronic_ISBN

978-1-4244-3864-8

Type

conf

DOI

10.1109/ICEMI.2009.5274091

Filename

5274091