Title :
Controlled polarisation and excitation of silicon on insulator isolated double quantum dots with remote charge sensing
Author :
Tanner, M.G. ; Podd, G. ; Williams, D.A.
Author_Institution :
Hitachi Cambridge Labs., Cavendish Labs., Cambridge, UK
Abstract :
In this paper a simulation-supported experimental investigation into the properties of highly doped (nphosphorus ~ 2.9x1019 cm-3) n-type silicon on insulator isolated double quantum dots (IDQDs) with integrated single electron transistor (SET) for charge sensing was presented. The structures were fabricated with post oxidation island diameters of between 80 and 125 nm on the same chip by means of electron beam lithography and reactive ion etching to give trench isolation. Low noise electrical measurements including microwave stimulation were performed at 4.2 K through immersion in liquid helium. The device layout and response offers the possibility of a scalable qubit system in silicon.
Keywords :
electron beam lithography; isolation technology; nanofabrication; oxidation; remote sensing; semiconductor quantum dots; silicon-on-insulator; single electron transistors; sputter etching; Si; controlled polarisation; device layout; electron beam lithography; integrated single electron transistor; liquid helium immersion; low noise electrical measurements; microwave stimulation; n-type silicon on insulator isolated double quantum dots; oxidation; reactive ion etching; remote charge sensing; scalable qubit system; size 125 nm; size 80 nm; temperature 4.2 K; trench isolation; Electric variables measurement; Electron beams; Etching; Lithography; Microwave measurements; Oxidation; Polarization; Quantum dots; Silicon on insulator technology; Single electron transistors;
Conference_Titel :
Silicon Nanoelectronics Workshop, 2008. SNW 2008. IEEE
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-2071-1
DOI :
10.1109/SNW.2008.5418422