Title :
P-type Si nanocrystal thin-film transistor
Author :
Zhou, Xin ; Rafiq, M.A. ; Mizuta, Hiroshi ; Oda, Shunri
Author_Institution :
Quantum Nanoelectron. Res. Center, Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
In this paper, the authors present p-type thin-film transistors based on size-controlled Si nanocrystals dispersed on SiO2 matrix. We demonstrate that the influence of Al/Si nanocrystals contacts on thin film transistor characteristics.
Keywords :
CVD coatings; elemental semiconductors; nanostructured materials; silicon; silicon compounds; thin film transistors; Si; SiO2; chemical vapour deposition; nanocrystals contacts; p-type nanocrystal thin-film transistor; Artificial intelligence; Conductivity; Control systems; Electrodes; Nanocrystals; Oxidation; Silicon; Size control; Substrates; Thin film transistors;
Conference_Titel :
Silicon Nanoelectronics Workshop, 2008. SNW 2008. IEEE
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-2071-1
DOI :
10.1109/SNW.2008.5418428