Title :
Enhancement of light absorption by Au L/S grating for thin SOI photodetector
Author :
Satoh, Hiroaki ; Inokawa, Hiroshi
Author_Institution :
Res. Inst. of Electron. Eng., Shizuoka Univ., Hamamatsu, Japan
Abstract :
This paper proposes a silicon-on-insulator (SOI) photodetector with gold (Au) line and space. (L/S) grating, which enhances light absorption via optical near-field by surface plasmon (SP) around the grating. Behavior of the enhanced light absorption for various grating widths, adjustment of the peak absorption wavelength, and dependence on the polarization of the incident light are discussed based on the electromagnetic simulations.
Keywords :
diffraction gratings; finite difference time-domain analysis; gold; light polarisation; photodetectors; silicon-on-insulator; surface plasmons; Au; electromagnetic simulations; finite difference-time domain method; incident light polarization; light absorption; line-space grating; optical near-field absorption; silicon-on-insulator; surface plasmon; thin semiconductor SOI photodetector; Electromagnetic scattering; Electromagnetic wave absorption; Electromagnetic wave polarization; Gold; Gratings; Optical polarization; Optical surface waves; Photodetectors; Plasmons; Silicon on insulator technology;
Conference_Titel :
Silicon Nanoelectronics Workshop, 2008. SNW 2008. IEEE
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-2071-1
DOI :
10.1109/SNW.2008.5418468
