Comparison and silicon realization of custom designed MEMS biomedical pressure sensors

In our modern living era, pressure sensing is one of the most performed measurements to enhance the quality of life. The more advanced technology such as silicon based Micro-electro-mechanical Systems (MEMS) technology is usually explored due to its competitive cost and proven performance. We have explored and implemented the design of MEMS micro pressure sensor on silicon for biomedical applications. Due to the challenging application requirements, many newer designs have been investigated in addition to the previously reported work. Comparisons of the performance of the new designs are herein presented and discussed according to the design stages. A highly proven technology offered by Infineon Technologies SensorNor AS is used in this research and the final implementations are also discussed. The final device is successfully implemented on silicon. In this paper, the extended new unreported design work and the fabrication result are discussed. Future works are also discussed in the final section.