Title :
Piezoelectric micropump for lab-on-a-chip applications
Author :
Rocha, J.G. ; Cardoso, V. ; Correia, V. ; Mendez, S. Lanceros ; Minas, G.
Author_Institution :
Dept. Ind. Electron., Univ. of Minho, Guimaraes, Portugal
Abstract :
This paper describes an on-chip pumping system and the correspondent driving circuit. The system can be used in lab-on-a-chip applications for pumping the fluids in the microchannels. The device is constituted by two chips placed together: a CMOS chip with the electronics and a glass chip, with the microchannels and the pumping system. This pumping system, wich is the main subject of the article is based on piezoelectric polymer actuators.
Keywords :
CMOS integrated circuits; glass; lab-on-a-chip; micropumps; piezoelectric actuators; polymers; CMOS chip; driving circuit; glass chip; lab-on-a-chip applications; microchannels; on-chip pumping system; piezoelectric micropump; piezoelectric polymer actuators; Acoustic propagation; Industrial electronics; Lab-on-a-chip; Microchannel; Micropumps; Monitoring; Polymers; Production; Pumps; Readout electronics; CMOSFET oscillators; Micropumps; Piezoelectric devices;
Conference_Titel :
Microelectronics (ICM), 2009 International Conference on
Conference_Location :
Marrakech
Print_ISBN :
978-1-4244-5814-1
DOI :
10.1109/ICM.2009.5418596
