Hexagonal shaped microcantilever based IR imaging sensor

This paper is an analytical study for a new design microcantilever based IR (Infra Red) sensor. Using hexagonal structure increases energy absorbed, and is useful for the imaging processing after that due to using hexagonal coordinates. Fill factor is also one of the most properties improved in this design. Bimaterial microcantilever is used as a mechanical sensor which is deflected based on the mismatch between the two thermal expansions for the materials used. Maximizing deflection is analyzed and computed NETD_TF (Noise Equivalent Temperature Difference) calculated as low as 2.5 mK which proof the good performance of the proposed sensor.