Small-sized large travel nano-positioning system based on tubular permanent magnet synchronous linear motor

With the high-speed development of modern science and technology as well as the rapid advancement of manufacturing technology, especially the micro-machining technology and semiconductor manufacturing, the feature size of micro-structure machinery is getting smaller and smaller and the positioning accuracy requirements for micro-machining platform and measurement platform have been increased to nanometer class. At present, small-sized and large travel nano-positioning system has become the research focus of the major countries in the world. In this paper, a miniaturized nano-positioning system based on the tubular permanent magnet synchronous linear motor and grating is established, in which the linear motor is adopted to realize large travel actuation and nano-positioning control and the grating is utilized as displacement measuring and feedback controlling device. Through the study of actuation control strategy and feedback control method, the actuation speed of greater than 3 mm/s and positioning stability of less than 10 nm in the 100 mm actuation range are obtained.