MEMS devices for high isolation switching and tunable filtering

Author

Peroulis, D. ; Pacheco, S. ; Sarabandi, K. ; Katehi, P.B.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

2

fYear

2000

fDate

11-16 June 2000

Firstpage

1217

Abstract

This paper presents resonant capacitive microelectromechanical switches and their possible applications in tunable filtering. Single switches with a down capacitance of 2.9 pF and inductive sections of 3 to 50 pH are demonstrated, resulting in resonant frequencies from 13 to 54 GHz. Designs of resonant switches connected in parallel are also implemented with major advantages in isolation and bandwidth. Finally, tunable filters using these switches are discussed.

Keywords

circuit tuning; coplanar waveguide components; micromechanical devices; microwave filters; microwave switches; millimetre wave filters; semiconductor switches; 13 to 54 GHz; 2.9 pF; MEMS devices; bandwidth; down capacitance; high isolation switching; inductive sections; isolation; resonant capacitive microelectromechanical switches; resonant frequencies; resonant switches; tunable filtering; Bandwidth; Capacitance; Coplanar waveguides; Geometry; Inductance; Joining processes; Microelectromechanical devices; Packet switching; Resonance; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest. 2000 IEEE MTT-S International

Conference_Location

Boston, MA, USA

ISSN

0149-645X

Print_ISBN

0-7803-5687-X

Type

conf

DOI

10.1109/MWSYM.2000.863578

Filename

863578